[Analysis Case] Evaluation of the Diffusion Layer Structure of Bipolar Transistors
Clearly observable structure of the diffusion layer including pn junction determination.
It is possible to observe in detail from an overview of the NPN bipolar transistors within commercially available LSI to an enlarged view of the emitter section. This is an example where a cross-section passing through the center of the emitter electrode was exposed, and AFM observation and SCM measurement were conducted. By overlaying the AFM image, the positional relationship with the wiring becomes clear.
- Company:一般財団法人材料科学技術振興財団 MST
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